Resumen
ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
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Informaciones generales
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Estado: PublicadoFecha de publicación: 2013-03Etapa: Norma Internacional publicada [60.60]
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Edición: 2Número de páginas: 116
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Comité Técnico :ISO/TC 201/SC 2ICS :71.040.40
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Ciclo de vida
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Anteriormente
RetiradaISO/TR 19319:2003
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Ahora
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