Draft
International Standard
ISO/DIS 17297
Microbeam analysis — Focused ion beam application for TEM specimen preparation — Vocabulary
Reference number
ISO/DIS 17297
Edition 1
Projet Norme internationale
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ISO/DIS 17297
84897
Indisponible en français
Projet de Norme internationale au stade enquête auprès des membres de l’ISO.

ISO/DIS 17297

ISO/DIS 17297
84897
Langue
Format
CHF 63
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Résumé

Numbers of FIB applications will soon be available with developments and advancements of FIB instruments including, in-line automatic operation, multiple sample preparation, in-situ lift-out, new ion sources and cryogenic, which are still in their infancy. The manufacturers/vendors pertaining to this field have technical characteristics to offer their unique features in terms of instrument technology. Due to such conditions, entities to be newly involved in this technical field are anticipated to increase, and there exists a risk of random development of technologies exploiting the essence of FIB. In the light of the situation where several different words are used for the same function of FIB, this standard defines unified terminology necessary to the FIB processing

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