This document describes procedures for the determination of the angle resolved scattering by optical components such as coated or uncoated optical elements, photonic structures, and materials that can be transparent, translucent, or opaque. It comprises scattering into the scattering sphere around the specimen usually separated into the backward and forward hemispheres. The procedures apply to wavelengths of radiation ranging from 5 nm in the extreme ultraviolet to 15 µm in the infrared spectral ranges.
Status: PublishedPublication date: 2020-12
Edition: 1Number of pages: 14
Technical Committee: ISO/TC 172/SC 9 Laser and electro-optical systems
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