Abstract
PreviewThis document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less ? "nanoscale" ? are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
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Status: PublishedPublication date: 2018-08
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Edition: 1Number of pages: 11
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- ICS :
- 13.040.35 Cleanrooms and associated controlled environments
Buy this standard
| Format | Language | |
|---|---|---|
| std 1 61 | PDF + ePub | |
| std 2 61 | Paper |
- CHF61
Life cycle
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