Quick links


published ISO standards *

Participating members
Observing members

* number includes updates

Reference Title Type
ISO/TC 201/SC 3/SG 1   Atomic Force Microscopy data format for hybrid metrology Working group
ISO/TC 201/SC 3/SG 2   Open source XPS Data and Discussion platforms Working group
ISO/TC 201/SC 3/SG 4   Information and data transfer format Working group


Liaison Committees from ISO/TC 201/SC 3

ISO/TC 201/SC 3 can access the documents of the committees below:

Reference Title ISO/IEC
ISO/TC 69/SC 6 Measurement methods and results ISO


Organizations in liaison (Category A and B)
Acronym Title Category
IUPAC International Union of Pure and Applied Chemistry A
IUVSTA International Union for Vacuum Science, Technique and Applications A
VAMAS Versailles Project on Advanced Materials and Standards A

ISO/TC 201/SC 3 - Secretariat

BSI [United Kingdom]

Bldg. C1.5
Reading RG7 4PR Berkshire.
United Kingdom