International Standard
ISO 17973:2024
Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
Reference number
ISO 17973:2024
Edition 3
2024-07
© ISO 2024
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Published (Edition 3, 2024)

ISO 17973:2024

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Format
CHF 63
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Abstract

This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule.

It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.

General information

  • Status
     : Published
    Publication date
     : 2024-07
    Stage
    : International Standard published [60.60]
  • Edition
     : 3
    Number of pages
     : 11
  • Technical Committee :
    ISO/TC 201/SC 7
    ICS :
    71.040.40 
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